This inventor holds 1 USPTO granted patent and 2 published patent applications and 2 EPO patents. Top assignee: Trikon Equipments Limited. Active years: 2001.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2001
Title: The Innovations of Gordon Robert Green
Introduction
Gordon Robert Green is a notable inventor based in Thornbury, GB. He has made significant contributions to the field of semiconductor technology. His innovative designs have led to the development of advanced equipment used in various applications.
Latest Patents
One of his key patents is for a Platen designed for semiconductor workpieces. This Platen comprises a ceramic body and a workpiece support surface, along with a base. It features an electrostatic chuck electrode, an RF electrode, a heater, a ground plane electrode, an embedded thermocouple, and a stainless steel support. This combination allows the platen to be RF driven while preventing unwanted plasma beneath it. Additionally, the chuck can function as an electrostatic chuck.
Career Highlights
Gordon Robert Green is associated with Trikon Equipments Limited, where he applies his expertise in semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor manufacturing equipment.
Collaborations
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Conclusion
Gordon Robert Green's contributions to semiconductor technology through his innovative designs and patents highlight his importance in the field. His work continues to influence advancements in semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile