The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2001
Filed:
Sep. 14, 1998
Applicant:
Inventor:
Gordon Robert Green, Thornbury, GB;
Assignee:
Trikon Equipments Limited, Gwent, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/300 ;
U.S. Cl.
CPC ...
H02N 1/300 ;
Abstract
A Platen, generally indicated at (,), comprises a ceramic body (,) and a workpiece support surface (,) and a base (,). Embodied within the body (,) are an electrostatic chuck electrode (,), an RF electrode (,), a heater (,), a ground plane electrode (,), an embedded thermocouple (,), and a stainless steel support (,). This combination provides a platen which can be RF driven, but has a screen to prevent unwanted plasma beneath the platen. The chuck can also be utilized as an electrostatic chuck.
Green, Gordon. (2001). Platen for semiconductor workpieces (U.S. Patent No. 6188563). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6188563
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile