Trikon Equipments Limited

Spp Process Technology Systems UK Limited

Gordon Robert Green

Robert Kenneth Trowell

Gary Proudfoot

Christopher David George

Paulo Edurado Lima

A Platen, generally indicated at (,), comprises a ceramic body (,) and a workpiece support surface (,) and a base (,). Embodied within the body (,) are an electrostatic chuck electrode (,), an RF electrode (,), a heater (,), a ground plane electrode (,), an embedded thermocouple (,), and a stainless steel support (,). This combination provides a platen which can be RF driven, but has a screen to prevent unwanted plasma beneath the platen. The chuck can also be utilized as an electrostatic chuck.

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Thornbury, United Kingdom

Gordon Robert Green