Glenn B Alers

Title: Innovations of Glenn B Alers

Introduction

Glenn B Alers is a notable inventor based in Scotts Valley, California. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His work focuses on innovative methods that enhance the performance and reliability of metal lines in semiconductor devices.

Latest Patents

One of his latest patents is titled "Selective capping of copper." This invention provides methods for selectively depositing refractory metal and metal nitride cap layers onto copper lines inlaid in a dielectric layer. The methods ensure that a cap layer is formed on the copper lines without significant deposition on the surrounding dielectric material. This process typically involves exposing the copper lines to a nitrogen-containing organo-metallic precursor and a reducing agent, allowing for selective deposition of the metal or metal nitride layer. In a specific embodiment, an amino-containing tungsten precursor is utilized to deposit a tungsten nitride layer, employing deposition methods such as CVD or ALD.

Another significant patent is the "Nanoparticle cap layer." This invention involves the deposition of functionalized nanoparticles on metal lines inlaid in dielectric materials to create a metal cap layer that reduces electromigration in the metal line. The functionalized nanoparticles are deposited onto activated metal surfaces, followed by sintering and annealing to eliminate the functional agents, resulting in a continuous capping layer. The final cap layer is approximately 1 to 10 nm thick, containing 30-100% atomic composition of the nanoparticle material. Various semiconductor processing tools can be adapted for this deposition process without increasing the footprint in the semiconductor fabrication plant.

Career Highlights

Glenn B Alers has built a successful career at Novellus Systems Incorporated, where he has been instrumental in advancing semiconductor manufacturing technologies. His innovative approaches have contributed to the development of more efficient and reliable semiconductor devices.

Collaborations

Throughout his career, Glenn has collaborated with several talented individuals, including Bart Jan Van Schravendijk and Thomas W Mountsier. These collaborations have fostered a creative environment that has led to groundbreaking advancements in semiconductor technology.

Conclusion

Glenn B Alers is a distinguished inventor whose work in semiconductor technology has led to significant innovations. His patents reflect a commitment to enhancing the performance and reliability of semiconductor devices, making a lasting impact in the industry.