This inventor holds 2 USPTO granted patents and 5 published patent applications. Top assignee: Intermolecular, Inc.. Active years: 2015.
Company Filing History:
Years Active: 2015
Title: Glen Eric Egami: Innovator in Semiconductor Processing Technology
Introduction
Glen Eric Egami is a notable inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor processing. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of wafer processing technologies.
Latest Patents
Glen's latest patents include innovative solutions for mounting semiconductor wafers during liquid immersion processing. One of his patents describes a chuck designed to prevent processing chemicals from contaminating large areas of the wafer's underside. This chuck structure limits chemical contact to small annular regions on the wafer's periphery, making it easier to clean. Additionally, he has developed methods that incorporate supplemental gas flows to create gas/liquid menisci, further protecting the wafer during processing.
Another significant patent involves a system and method for reducing particles and marks on wafer surfaces after reactor processing. This invention features a cleaning chamber with a base housing a chuck, a top portion with multiple cups, and a middle portion that acts as both a lid and a second chuck. The design allows for vertical alignment and pivoting, ensuring effective cleaning while maintaining the integrity of the wafer.
Career Highlights
Glen Eric Egami is currently employed at Intermolecular, Inc., where he continues to innovate in semiconductor technologies. His work has been instrumental in advancing the capabilities of wafer processing, making significant strides in the industry.
Collaborations
Throughout his career, Glen has collaborated with talented individuals such as Satbir Kahlon and Aaron T Francis. These partnerships have contributed to the development of his groundbreaking technologies.
Conclusion
Glen Eric Egami's contributions to semiconductor processing through his patents and innovative designs have positioned him as a key figure in the industry. His work continues to influence the future of wafer processing technologies.