Los Altos, CA, United States of America

George R Koch


Average Co-Inventor Count = 2.0

ph-index = 6

Forward Citations = 524(Granted Patents)


Company Filing History:


Years Active: 1982-2009

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8 patents (USPTO):Explore Patents

Title: Innovations of George R Koch

Introduction

George R Koch is a notable inventor based in Los Altos, CA. He holds a total of 8 patents that showcase his contributions to technology and engineering. His work primarily focuses on advancements in substrate handling and imaging apparatuses.

Latest Patents

One of his latest patents is for a chamberless substrate handling system. This invention allows for the handling of substrates without substantially touching their surfaces. It features annular rings that form orifices, with one ring creating an air bearing portion. This design enables a flow of gas to establish a cushion of air between the puck and the surface, while also allowing for vacuum drawing through the orifices in the opposite direction. Another significant patent is the transverse magnetic field voltage isolator. This invention describes a scanning electron microscope (SEM) where the entire imaging apparatus is supported on air bearings. It includes a multi-stage differentially pumped vacuum seal area that provides a localized vacuum zone for wafer examination. The SEM can move on its air bearings, allowing any portion of the wafer to be examined. Additionally, it features a voltage-isolating passageway that provides high voltage isolation between components at different voltage levels, incorporating a transverse magnetic field across its passageway.

Career Highlights

George R Koch has worked with prominent companies in the technology sector, including Lam Research Corporation and Kla Tencor Corporation. His experience in these organizations has contributed to his innovative work and patent development.

Collaborations

Some of his notable coworkers include Douglas K Masnaghetti and Carl T Petersen, III. Their collaboration has likely influenced the advancements in the projects they have worked on together.

Conclusion

George R Koch's contributions to technology through his patents reflect his innovative spirit and expertise in the field. His work continues to impact the industry and inspire future advancements.

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