Saratoga, CA, United States of America

George Mirth


Average Co-Inventor Count = 1.9

ph-index = 2

Forward Citations = 15(Granted Patents)


Company Filing History:


Years Active: 2006-2015

where 'Filed Patents' based on already Granted Patents

5 patents (USPTO):

Title: Innovations of George Mirth

Introduction

George Mirth is an accomplished inventor based in Saratoga, CA, with a notable portfolio of five patents. His work primarily focuses on advancements in polishing and cleaning technologies, showcasing his commitment to innovation in the field.

Latest Patents

Among his latest patents is a combinatorial tool for mechanically-assisted surface polishing and cleaning. This invention involves polishing and cleaning techniques that are combinatorially processed and evaluated. The polishing system includes a reactor assembly with multiple reaction chambers, featuring a rotatable polishing head, slurry and chemical distribution, chemical and water rinse, and slurry and fluid removal. Different downward forces can be applied to the polishing heads to evaluate optimum process conditions. Additionally, channels in the polishing pads can redistribute slurry and chemicals to the polishing area. Another significant patent is related to lithographic tool in situ clean formulations. This patent describes compositions and methods for removing polymeric materials from surfaces, specifically aimed at cleaning contaminant buildup from lithography apparatus without the need for total disassembly.

Career Highlights

George Mirth has made significant contributions to the field through his work at various companies, including Intermolecular, Inc. and Advanced Technology Materials, Inc. His innovative approaches have led to advancements that benefit the industry.

Collaborations

Throughout his career, George has collaborated with talented individuals, including Kim Van Berkel and Tianniu Chen. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

George Mirth's contributions to the field of polishing and cleaning technologies through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in the industry.

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