Company Filing History:
Years Active: 1984-1989
Title: George Maheras: Innovator in Photoresist Technology
Introduction
George Maheras is a notable inventor based in Fort Collins, CO (US). He has made significant contributions to the field of photoresist technology, holding a total of 5 patents. His work focuses on processes that enhance the functionality and efficiency of photoresist materials used in various applications.
Latest Patents
One of Maheras's latest patents is a "Multiple photoresist layer process using selective hardening." This innovative process selectively hardens a surface layer of a polymeric photoresist, making it opaque and insoluble in photoresist carrier solvents. The selectivity is coextensive with the polymeric/monomeric pattern created in the photoresist. The hardening processes include controlled exposure to gas plasmas, ion bombardment, or ultraviolet radiation. The hardened polymeric regions serve as a barrier to the carrier solvent and the developer used to remove the monomeric regions. This process can be applied in a two-layer photoresist structure, allowing for efficient development of both layers in a single operation.
Another significant patent is the "MOSFET process using implantation through silicon." This simplified small geometry MOS process incorporates a tungsten shunt layer on the thin silicon gate electrode layer. This innovation allows for a reduction in the thickness of the silicon layer and enables precise control over shallow source/drain regions without channeling. The process also facilitates the automatic formation of lightly doped extensions of the source and drain regions.
Career Highlights
George Maheras is currently employed at NCR Corporation, where he continues to develop cutting-edge technologies in the field of photoresists. His expertise and innovative approaches have positioned him as a key figure in advancing semiconductor manufacturing processes.
Collaborations
Throughout his career, Maheras has collaborated with notable colleagues, including Hubert O. Hayworth and Gayle W. Miller. These collaborations have contributed to the development of various technologies and patents in the industry.
Conclusion
George Maheras is a distinguished inventor whose work in photoresist technology has led to significant advancements in the field. His innovative patents and contributions continue to influence the semiconductor industry and enhance manufacturing processes.