Company Filing History:
Years Active: 2000-2002
Title: Innovations of Gary Lee Evans in Semiconductor Processing
Introduction
Gary Lee Evans is a notable inventor based in Pleasanton, CA, who has made significant contributions to the field of semiconductor processing. With a total of two patents to his name, Evans has focused on developing systems and methods that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Systems and methods for epitaxial processing of a semiconductor substrate." This invention describes a thermal processing system that improves temperature uniformity during the chemical vapor deposition (CVD) epitaxial deposition process. The design includes an inductor that couples energy to a susceptor, with adjustable spacing to optimize temperature control during various stages of the process. This innovation addresses common issues related to temperature non-uniformities, which can lead to defects in semiconductor wafers.
Another significant patent by Evans is "Structure and method for reducing slip in semiconductor wafers." This invention features a semiconductor chemical vapor deposition reactor that includes a susceptor and a reflective cover. The cover minimizes temperature gradients on the wafers by reflecting heat back onto them, thereby reducing slip. The design also incorporates a central opening for process gases, which enhances the deposition process through a Bernoulli effect.
Career Highlights
Throughout his career, Gary Lee Evans has worked with several prominent companies in the semiconductor industry, including Mattson Technology, Inc. and Concept Systems Design, Inc. His experience in these organizations has contributed to his expertise in semiconductor processing technologies.
Collaborations
Evans has collaborated with notable professionals in the field, including Robert D. Mailho and Mark J. O'Hara. These collaborations have likely enriched his work and led to advancements in semiconductor technologies.
Conclusion
Gary Lee Evans is a distinguished inventor whose work in semiconductor processing has led to innovative solutions that improve manufacturing efficiency. His patents reflect a deep understanding of the challenges in the industry and a commitment to advancing technology.