Germantown, MD, United States of America

Gary Dahrooge


Average Co-Inventor Count = 5.0

ph-index = 1

Forward Citations = 14(Granted Patents)


Company Filing History:


Years Active: 2004

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1 patent (USPTO):

Title: Innovator Spotlight: Gary Dahrooge - Pioneering Plasma Processes in Semiconductor Manufacturing

Introduction: Gary Dahrooge, a brilliant inventor based in Germantown, MD, has made significant contributions to the realm of semiconductor manufacturing with his groundbreaking patent on a plasma process for removing polymer and residues from substrates.

Latest Patents: Gary Dahrooge holds 1 patent for his innovative process which involves exposing semiconductor substrates to plasmas of neutral chemistry. This method effectively removes polymers formed during etching and etch residues, making it particularly well-suited for substrates with low k dielectric materials and copper interconnects.

Career Highlights: Gary Dahrooge is affiliated with Axcelis Technology, Inc., a company renowned for its advancements in semiconductor technology. Working at the forefront of innovation, Gary has played a pivotal role in revolutionizing semiconductor manufacturing processes.

Collaborations: Throughout his career, Gary Dahrooge has collaborated with esteemed colleagues such as Han Qingyuan and Carlo Waldfried. Together, they have pushed the boundaries of technological advancement in the semiconductor industry, contributing to cutting-edge developments in plasma processes.

Conclusion: Gary Dahrooge's dedication to pioneering novel solutions in semiconductor manufacturing has solidified his reputation as a trailblazing inventor. His work continues to shape the landscape of technological innovation, leaving a lasting impact on the industry.

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