For the Inventor, By the Inventor

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Beverly, MA, United States of America

Axcelis Technology, Inc.

USPTO Granted Patents = 3

% Expired Patents = 33.3

Forward Citations = 18

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7 inventors (with patents filed for the assignee):

Allan D Weed (1 out of 11 patents)

Orlando Escorcia (1 out of 13 patents)

Carlo Waldfried (1 out of 36 patents)

4. Han Qingyuan (1 out of 1 patent)

5. Gary Dahrooge (1 out of 1 patent)

6. Ivan Berry (1 out of 20 patents)

7. Ashwin Madhukar Purohit (1 out of 17 patents)

3 patents: Sort by Forward Citations

1. 10186446 - Adjustable circumference electrostatic clamp (2019-01-22),

2. 7385799 - Offset phase operation on a multiphase AC electrostatic clamp (2008-06-10),

3. 6834656 - Plasma process for removing polymer and residues from substrates (2004-12-28),

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USPTO Data Jan 1 1976 - Oct 6 2026

3 Patents

#44 in Beverly, MA

#3,963 in Massachusetts

#73,815 in US

Beverly, MA, United States of America

Axcelis Technology, Inc.

Forward Citations = 18

7 inventors:

Allan D Weed (1 out of 11 patents)

Orlando Escorcia (1 out of 13 patents)

Carlo Waldfried (1 out of 36 patents)

4. Han Qingyuan (1 out of 1 patent)

5. Gary Dahrooge (1 out of 1 patent)

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