Kawasaki, Japan

Fumitaka Shoji

USPTO Granted Patents = 5 

Average Co-Inventor Count = 1.8

ph-index = 3

Forward Citations = 968(Granted Patents)


Company Filing History:


Years Active: 2015-2025

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5 patents (USPTO):Explore Patents

Title: Fumitaka Shoji: Innovator in Semiconductor Technology

Introduction

Fumitaka Shoji is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing reactor systems and wafer-supporting devices, which are crucial in semiconductor manufacturing.

Latest Patents

One of his latest patents is a reactor system comprising a tuning circuit. This invention includes a susceptor assembly designed to optimize the performance of reactor systems. The susceptor body is defined by an outer edge and consists of both outer and inner portions. The first tuning circuit features an edge electrode coupled to the susceptor body, while a second tuning circuit includes a center electrode. This configuration allows for improved efficiency in reactor operations.

Another significant patent is for a wafer-supporting device and method for producing the same. This device is designed to support a wafer in a semiconductor-processing apparatus. It features a base surface with protrusions that have rounded tips, ensuring that the reverse side of the wafer is supported entirely by point contact. The design of the protrusions is carefully calculated to meet specific requirements for 300-mm wafers, enhancing the reliability of semiconductor processing.

Career Highlights

Fumitaka Shoji has worked with prominent companies in the semiconductor industry, including ASM IP Holding B.V. and ASM IP Holdings B.V. His experience in these organizations has allowed him to develop innovative solutions that address the challenges faced in semiconductor manufacturing.

Collaborations

Throughout his career, Fumitaka has collaborated with talented individuals such as Naoto Tsuji and Yuya Nonaka. These collaborations have contributed to the advancement of technology in the semiconductor field.

Conclusion

Fumitaka Shoji's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations.

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