Company Filing History:
Years Active: 2020-2023
Title: Fu An Tien: Innovator in Lithography and Semiconductor Technology
Introduction
Fu An Tien is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of six patents. His work primarily focuses on lithography simulation methods and photo mask data correction methods, which are crucial for the manufacturing of semiconductor devices.
Latest Patents
One of Fu An Tien's latest patents is a lithography simulation method. This method optimizes a lithography model in a lithography simulation by forming a mask according to a given layout. A wafer is printed using this mask, and the pattern formed on the printed wafer is measured. The method simulates a wafer pattern using a wafer edge bias table and the given mask layout. It then obtains a difference between the simulated wafer pattern and the measured pattern, adjusting the wafer edge table according to this difference.
Another significant patent is the photo mask data correction method. This method involves manufacturing a photo mask for a semiconductor device by receiving a plurality of hotspot regions of a mask layout. The method classifies these hotspot regions into two or more groups, ensuring that similar regions are grouped together. It includes correcting a first hotspot region to enhance it and subsequently correcting other regions in the same group using this enhancement.
Career Highlights
Fu An Tien is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative approaches and patented methods have contributed to advancements in lithography and semiconductor manufacturing processes.
Collaborations
Fu An Tien has collaborated with notable colleagues, including Hsu-Ting Huang and Ru-Gun Liu. Their teamwork has fostered an environment of innovation and excellence in their projects.
Conclusion
Fu An Tien's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence advancements in lithography and semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.