Frederick B Ammon

Title: The Innovative Contributions of Frederick B. Ammon

Introduction

Frederick B. Ammon is a notable inventor based in Essex, Massachusetts, recognized for his innovative contributions to the field of semiconductor equipment. With a focus on enhancing manufacturing processes, Ammon has developed a unique method that addresses the challenges of workpiece support cleaning.

Latest Patents

Ammon holds a patent for a "Platen cleaning method," which introduces a novel approach to cleaning a workpiece support. This method involves using a workpiece that has been coated on its bottom surface with a suitable material. The specially coated workpiece is placed on the support, and after a certain period, it is removed, taking with it particles from the support. In certain embodiments, the workpiece undergoes an ion implantation process to increase its temperature and enhance the tackiness of the coating on the bottom surface. The materials used for coating can vary, including photoresists, oxides, and deposited glasses.

Career Highlights

Frederick B. Ammon is associated with Varian Semiconductor Equipment Associates, Inc., where he has made significant contributions to the development of semiconductor manufacturing technologies. His work has been instrumental in improving the efficiency and effectiveness of cleaning processes in the industry.

Collaborations

Ammon has collaborated with notable colleagues, including David E. Suuronen and David Burgdorf, who have contributed to the advancement of technologies in the semiconductor field.

Conclusion

Frederick B. Ammon's innovative work in the development of cleaning methods for workpiece supports has made a significant impact on the semiconductor industry. His contributions continue to influence manufacturing processes and enhance the efficiency of semiconductor equipment.