Varian Semiconductor Equipment Associates, Inc.

Frederick B Ammon

David E Suuronen

Lyudmila Stone

David Burgdorf

A method for cleaning a workpiece support that includes using a workpiece that has been coated on its bottom surface with a suitable material is disclosed. This specially coated workpiece is placed on the support, and some time later, it is removed, taking with it particles from the support. In certain embodiments, the workpiece undergoes an ion implantation process to increase its temperature, and to increase the tackiness of the coating on the bottom surface. The material used to coat the bottom can be of variable types, including photoresists, oxides and deposited glasses.

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Essex, MA, United States of America

Frederick B Ammon