Frank Y H Fan

Title: Frank Y H Fan: Innovator in Semiconductor Technology

Introduction

Frank Y H Fan is a notable inventor based in Pleasanton, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the methods used to detect and review defects in semiconductor wafers.

Latest Patents

One of his latest patents is titled "Method and apparatus for reviewing voltage contrast defects in semiconductor wafers." This invention describes techniques for identifying, locating, detecting, and reviewing voltage contrast defects. The system includes a charged particle beam defect review system equipped with one or more electron flood guns. By flooding a semiconductor wafer or a sub-region of it with electrons, the surface is charged to a specific voltage level, which significantly enhances the voltage contrast review techniques. This method allows for the manifestation of voltage contrast defects that may not be visible otherwise.

Another significant patent is "E-beam detection of defective contacts/vias with flooding and energy filter." This invention relates to a method for robustly detecting defective high aspect ratio (HAR) features on semiconductor specimens. The surface area of the specimen is charged, and a primary beam is directed onto it. Scattered electrons generated from this interaction are extracted, and an energy filter is applied to remove lower energy electrons. The filtered electrons are then detected, generating image data that is analyzed to identify defects.

Career Highlights

Frank Y H Fan is currently employed at Kla-Tencor Technologies Corporation, where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the techniques used in defect detection and review processes.

Collaborations

Some of his notable coworkers include Mark Armstrong McCord and Jan A Lauber, who have collaborated with him on various projects within the semiconductor field.

Conclusion

Frank Y H Fan's contributions to semiconductor technology through his innovative patents have significantly impacted the industry. His work continues to pave the way for advancements in defect detection and review techniques, showcasing his importance as an inventor in this field.