Frank Vincent Belanger

Title: Frank Vincent Belanger: Innovator in Contaminant Detection Systems

Introduction

Frank Vincent Belanger is a notable inventor based in Webster, MA (US). He has made significant contributions to the field of semiconductor processing through his innovative patent. His work focuses on improving the detection of contaminants, which is crucial for maintaining the integrity of semiconductor manufacturing processes.

Latest Patents

Frank Vincent Belanger holds a patent for "Systems and methods for detecting contaminants." This invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps, and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room, and the dry traps, Tenax traps, and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. Once the sampling interval is complete, the unit is sent to an analysis facility for processing.

Career Highlights

Frank is currently employed at Entegris, Inc., where he continues to develop innovative solutions for the semiconductor industry. His work has been instrumental in enhancing the reliability and efficiency of contaminant detection systems.

Collaborations

Throughout his career, Frank has collaborated with talented professionals, including Anatoly Grayfer and Jürgen Michael Lobert. These collaborations have contributed to the advancement of technologies in the field.

Conclusion

Frank Vincent Belanger is a dedicated inventor whose work in contaminant detection systems has made a significant impact on the semiconductor industry. His innovative approach and collaboration with other experts continue to drive advancements in this critical field.