Company Filing History:
Years Active: 2020
Title: Frank Schadt: Innovator in Microlithography
Introduction
Frank Schadt is a notable inventor based in Neu-Ulm, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative patent related to projection exposure apparatuses. His work has implications for the manufacturing of integrated circuits and other advanced technologies.
Latest Patents
Frank Schadt holds a patent for a "Projection exposure apparatus and method for measuring a projection lens." This invention involves a microlithographic projection exposure apparatus that features a projection lens designed to image an object plane onto an image plane. The apparatus utilizes an immersion liquid during operation, which is temporarily provided between the projection lens and the image plane. A measurement structure is arranged in the immersion liquid, configured to generate a measurement pattern. Additionally, the apparatus includes a measurement device that measures this pattern. The measurement structure incorporates an absorption layer made of silicon oxide, silicon oxynitride, or nitride. This patent showcases Schadt's expertise in enhancing the precision of projection systems.
Career Highlights
Frank Schadt is associated with Carl Zeiss SMT GmbH, a leading company in the field of optical systems and microlithography. His role at the company has allowed him to work on cutting-edge technologies that are essential for modern manufacturing processes. His contributions have been instrumental in advancing the capabilities of projection exposure systems.
Collaborations
Throughout his career, Frank Schadt has collaborated with esteemed colleagues such as Eugen Foca and Uwe Hempelmann. These partnerships have fostered innovation and have been crucial in the development of advanced technologies in the field.
Conclusion
Frank Schadt's work in microlithography and his innovative patent demonstrate his significant impact on the industry. His contributions continue to influence the development of advanced manufacturing technologies.