Santa Cruz, CA, United States of America

Frank S Menagh


Average Co-Inventor Count = 7.0

ph-index = 2

Forward Citations = 60(Granted Patents)


Company Filing History:


Years Active: 2003-2005

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2 patents (USPTO):Explore Patents

Title: **The Innovative Mind of Frank S. Menagh**

Introduction

Frank S. Menagh, an accomplished inventor based in Santa Cruz, California, has made significant contributions to the field of semiconductor technology. With a total of two patents to his name, Menagh’s innovations continue to impact the industry and improve wafer processing systems.

Latest Patents

Menagh’s latest patents include a groundbreaking semiconductor wafer processing system featuring vertically-stacked process chambers. This innovative system consists of a multi-chamber module that includes dedicated loadlock chambers for each process chamber. Each chamber is equipped with a chuck designed to hold semiconductor wafers during the processing stage.

An important aspect of this invention is the dual-wafer single-axis transfer arm. This monolithic arm, pivotally mounted within the loadlock chamber, enables the simultaneous transport of one unprocessed and one processed wafer between the loadlock and the process chambers. This innovative approach not only enhances efficiency but also optimizes the processing workflow.

Career Highlights

Throughout his career, Frank S. Menagh has worked with notable companies in the semiconductor industry, including Aviza Technology Limited and ASML US, Inc. His experience in these organizations has played a significant role in shaping his understanding of wafer processing technologies and driving his inventive spirit.

Collaborations

Menagh has had the opportunity to collaborate with esteemed colleagues, including Richard Savage and Helder R. Carvalheira. These partnerships have allowed him to exchange ideas and drive innovations in semiconductor technology further.

Conclusion

Frank S. Menagh's inventive contributions, particularly in the realm of semiconductor wafer processing systems, highlight his role as a significant player in technological advancements. His ongoing work continues to inspire those in the industry and push the boundaries of what is possible in semiconductor processing.

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