Company Filing History:
1 out of 5,671 
1 out of 1,020 Years Active: 2015-2018
Title: Frank Kahlenberg: Innovator in Advanced Process Control
Introduction
Frank Kahlenberg is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of advanced process control, particularly in the semiconductor industry. With a total of 2 patents, Kahlenberg's work focuses on improving the precision and efficiency of manufacturing processes.
Latest Patents
Kahlenberg's latest patents include "Advanced Process Control Methods for Process-Aware Dimension Targeting." This patent discloses methods of advanced process control (APC) for specific processes, such as photolithography or etch processes. The innovation involves measuring a parameter on a target feature and using an adjusted parameter value to minimize dimension variations across patterns. This method enhances the consistency of results when generating patterns on different wafers.
Another significant patent is "Active Pad Patterns for Gate Alignment Marks." This invention outlines methods for forming RX pads with gate alignment marks that reduce noise between layers while maintaining uniformity in chemical mechanical polishing (CMP) processes. The patent details the configuration of RX pads and gate alignment marks to ensure precise alignment and performance in integrated circuits.
Career Highlights
Throughout his career, Frank Kahlenberg has worked with prominent companies in the semiconductor industry, including GlobalFoundries Inc. and GlobalFoundries Singapore Pte. Ltd. His experience in these organizations has allowed him to develop and refine his innovative approaches to process control.
Collaborations
Kahlenberg has collaborated with talented individuals such as Philipp Jaschinsky and Sirko Kramp. These partnerships have contributed to the advancement of his research and the successful implementation of his patented technologies.
Conclusion
Frank Kahlenberg is a distinguished inventor whose work in advanced process control has made a significant impact on the semiconductor industry. His innovative patents demonstrate his commitment to enhancing manufacturing processes and ensuring precision in technology.