Feng-Chi Chung

Title: Innovations of Feng-Chi Chung

Introduction

Feng-Chi Chung is a notable inventor based in Miaoli County, Taiwan. He has made significant contributions to the field of virtual metrology and processing systems. With a total of 3 patents, his work has advanced the technology used in manufacturing processes.

Latest Patents

One of his latest patents is a "Virtual Metrology System and Method." This system includes a process apparatus that produces a workpiece based on a set of process data. The virtual metrology server gathers this data, clusters it to obtain data clusters, and compares these clusters with established patterns. If the clusters align with the patterns, the system performs necessary maintenance, repair, and overhaul steps on the process apparatus.

Another significant patent is the "Method of Monitoring Processing System for Processing Substrate." This method involves acquiring data from a processing system for various parameters. It includes grouping these parameters into sub-groups, constructing a principal components analysis (PCA) model, and determining a statistical quantity using the PCA model. This innovative approach enhances the monitoring and efficiency of processing systems.

Career Highlights

Feng-Chi Chung is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work at this organization has allowed him to apply his innovative ideas in practical settings, contributing to advancements in technology.

Collaborations

He has collaborated with notable coworkers, including Ching-Hsing Hsieh and Yi-Chun Lin. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Feng-Chi Chung's contributions to virtual metrology and processing systems demonstrate his commitment to innovation in technology. His patents reflect a deep understanding of complex processes and a drive to improve manufacturing efficiency.