The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Feb. 08, 2017
United Microelectronics Corp., Hsinchu, TW;
Lian-Hua Shih, Chiayi, TW;
Chia-Chi Chang, Tainan, TW;
Li-Ting Lin, Tainan, TW;
Ching-Hsing Hsieh, Zhubei, TW;
Feng-Chi Chung, Zhunan Township, TW;
Meng-Chih Chang, Kaohsiung, TW;
Ming-Tung Wang, Jiadong Township, TW;
Chiu-Ping Chang, Kaohsiung, TW;
Yung-Yu Yang, Tainan, TW;
UNITED MICROELECTRONICS CORP., Hsinchu, TW;
Abstract
A method of monitoring a processing system for processing a substrate is provided. The method includes the following steps: acquiring data from the processing system for a plurality of parameters, the data including a plurality of data values; grouping the parameters into a plurality of sub-groups, each of the sub-groups including a plurality of correlated parameters; constructing a principle components analysis (PCA) model from the data values for the correlated parameters in a first one of the sub-groups, including normalizing the data values in the first one of the sub-groups with a first weighting factor and a second weighting factor, wherein the first weighting factor is different from the second weighting factor; and determining a statistical quantity using the PCA model.