This inventor holds 3 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2004-2005.
Location History:
- Chung-Ho, TW (2004 - 2005)
- Taipei, TW (2005)
Company Filing History:
Years Active: 2004-2005
Title: Innovations of Fan-Lin Lu
Introduction
Fan-Lin Lu is a notable inventor based in Chung-Ho, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His work focuses on enhancing the efficiency and accuracy of wafer handling systems.
Latest Patents
One of his latest patents is the "Optical Wafer Presence Sensor System." This innovative system includes a transfer chamber designed to receive a wafer. It features an optical sensor that emits a sensing beam and receives a beam reflected from the wafer to determine its presence in the chamber. The system also incorporates means to reflect away the sensing beam when it reaches the chamber bottom, preventing misinterpretation of wafer presence when no wafer is present.
Another significant patent is the "Apparatus and Method for Positioning a Cassette Pod onto a Loadport by an Overhead Hoist Transport System." This invention describes an apparatus that includes a vertical front panel of a process machine with a docking opening. It features a loadport stage extending horizontally, guiding plates for proper alignment, and a clamp positioner that facilitates the unloading operation of the cassette pod.
Career Highlights
Fan-Lin Lu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has contributed to advancements in manufacturing processes and technologies.
Collaborations
He has collaborated with notable coworkers, including Ko-Chin Chung and Ho-Jen Chen, who have also contributed to the field of semiconductor innovations.
Conclusion
Fan-Lin Lu's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and excellence in the industry. His work continues to influence the efficiency of wafer handling systems, showcasing the importance of inventors in technological advancement.