The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Mar. 31, 2003
Ho-jen Chen, Tucheng, TW;
Ton-lee Lee, Hsin-Chu, TW;
Ko-chin Chung, Taipei, TW;
Fan-lin LU, Chung-Ho, TW;
Ho-Jen Chen, Tucheng, TW;
Ton-Lee Lee, Hsin-Chu, TW;
Ko-Chin Chung, Taipei, TW;
Fan-Lin Lu, Chung-Ho, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin Chu, TW;
Abstract
A wafer presence optical sensor system comprises a transfer chamber adapted to receive a wafer, an optical sensor comprising means emitting a sensing beam and means receiving a beam reflected from the wafer to ascertain wafer presence in the chamber, and means to reflect away the sensing beam when reaching a chamber bottom. The reflecting means includes an oblique area made in an inner surface of the chamber bottom or, alternatively, a body with an oblique area placed on the inner surface. Reflecting away the sensing beam when no wafer is present in the transfer chamber prevents the receiving means from receiving the beam reflected from the chamber bottom and thus thwarts the misinterpretation of wafer presence.