Location History:
- Suwon-si, KR (2010 - 2011)
- Gyeonggi-do, KR (2010 - 2011)
Company Filing History:
Years Active: 2010-2011
Title: Eun-kyung Baek: Innovator in Semiconductor Technology
Introduction
Eun-kyung Baek is a prominent inventor based in Suwon-si, South Korea. She has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. Her work focuses on innovative methods for fabricating flash memory devices and semiconductor microstructures.
Latest Patents
One of her latest patents involves methods of fabricating flash memory devices. This invention includes forming a silicide on exposed upper and side surfaces of a control gate, which helps prevent short circuits between cell gate lines. The methods encompass the formation of gate lines that consist of multiple cell gate lines and selection gate lines. Each gate line features a stacked structure that includes a tunnel insulating layer, a floating gate, a gate insulating layer, and a polysilicon layer that operates as a control gate, all built on a semiconductor substrate. Additionally, the methods include forming a first insulating layer that selectively fills gaps between the cell gate lines and does not fill spaces located on the outer sides of the selection gate lines. A spacer is formed on the outer sides of the selection gate lines, followed by the formation of a second insulating layer in the space where the spacer is located.
Another notable patent is a method of fabricating a semiconductor microstructure. This method involves forming a lower material layer on a semiconductor substrate, which includes a nitride of a Group III-element. The process continues with the formation of a mold material layer and an etching mask, followed by anisotropic and isotropic etching of both the mold material layer and the lower material layer.
Career Highlights
Eun-kyung Baek is currently employed at Samsung Electronics Co., Ltd., where she continues to innovate in the semiconductor field. Her work has been instrumental in advancing the technology used in flash memory devices, which are critical components in modern electronics.
Collaborations
Throughout her career, Eun-kyung has collaborated with notable colleagues, including Ju-seon Goo and Jong-Wan Choi. These collaborations have contributed to her success and the development of her innovative patents.
Conclusion
Eun-kyung Baek is a trailblazer in semiconductor technology, with a focus on enhancing the efficiency and reliability of flash memory devices. Her contributions through her patents reflect her commitment to innovation in the field.