Company Filing History:
Years Active: 2008-2012
Title: Etsurou Morita: Innovator in Semiconductor Technology
Introduction
Etsurou Morita is a prominent inventor based in Tokyo, Japan, known for his significant contributions to semiconductor technology. With a total of 13 patents to his name, Morita has made remarkable advancements in the field, particularly in wafer measurement and manufacturing processes.
Latest Patents
One of Morita's latest patents is a wafer surface measuring apparatus. This innovative device measures the surface of a wafer by irradiating a laser beam on it. The apparatus features a measuring stage that supports the outer edge of the wafer without contacting its rear surface. It includes a wafer carrying means that moves the wafer over the measuring stage and loads it from an upward side. Additionally, a rotary drive unit rotates the measuring stage, and an ejection hole at the center supplies gas to the rear surface of the wafer. The wafer carrying means utilizes a chuck that holds the wafer in a non-contact manner, bending it into an upwardly convex shape.
Another notable patent is a method of manufacturing a semiconductor wafer by forming a strain relaxation SiGe layer on an insulating layer of a SOI wafer. This process involves creating a lattice relaxation or partly lattice-relaxed strain relaxation SiGe layer on the insulating layer, with a gradient of Ge concentration that decreases toward the surface. The wafer is then subjected to heat treatment in an oxidizing atmosphere.
Career Highlights
Etsurou Morita is currently associated with Sumco Corporation, a leading company in the semiconductor industry. His work has significantly impacted the development of advanced semiconductor technologies, enhancing the efficiency and precision of wafer manufacturing.
Collaborations
Morita has collaborated with notable colleagues, including Akihiko Endo and Isoroku Ono. Their combined expertise has contributed to the successful development of innovative technologies in the semiconductor field.
Conclusion
Etsurou Morita's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in wafer measurement and manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.