Esen Salcin

Title: **Esen Salcin: Innovator in Semiconductor Metrology**

Introduction

Esen Salcin is a prominent inventor based in Tempe, AZ, whose contributions to metrology in the semiconductor industry have led to significant advancements. With a total of two patents under his belt, Salcin has made remarkable strides in developing methods and systems that enhance measurement accuracy and efficiency.

Latest Patents

Esen Salcin's latest innovations include two key patents. The first patent, titled "Methods and Systems for Co-Located Metrology," features sophisticated methods and systems for performing co-located measurements of semiconductor structures using multiple measurement subsystems. This invention focuses on monitoring and correcting the alignment of the measurement spot with a metrology target to maximize co-location, allowing for simultaneous measurements at high throughput. The system also effectively separates measurement signals from each subsystem to optimize signal information from simultaneous measurements.

The second patent, "Single Wavelength Ellipsometry with Improved Spot Size Capability," introduces advanced methods for performing single wavelength ellipsometry (SWE) with a reduced measurement spot size. This invention places a pupil stop near the pupil plane and a field stop near the image plane to decrease sensitivity to diffraction effects and undesired optical-structural interactions. Additionally, it incorporates a linear polarizer with a nanoparticle-based element to improve illumination beam quality. These enhancements significantly reduce measurement spot size and elevate tool-to-tool matching performance for small targets.

Career Highlights

Currently, Esen Salcin is associated with KLA-Tencor Corporation, a leader in process control and yield management solutions for the semiconductor industry. His work within this esteemed organization highlights his commitment to innovation in semiconductor technology, paving the way for more advanced and precise metrology systems.

Collaborations

Throughout his career, Salcin has collaborated with notable colleagues including Fuming Wang and Kevin A. Peterlinz. These collaborations have enriched the research and development processes within their projects, contributing to the advancement of semiconductor metrology and providing solutions that meet the industry's evolving demands.

Conclusion

Esen Salcin stands out as an influential inventor whose work has significantly impacted the semiconductor industry. His dedication to innovation, reflected in his cutting-edge patents, continues to drive advancements in measurement technology. As he collaborates with skilled professionals at KLA-Tencor Corporation, Salcin is sure to remain a key player in shaping the future of semiconductor metrology.