Company Filing History:
Years Active: 2017
Title: Eric W. Deguns: Innovator in Gas Deposition Systems
Introduction
Eric W. Deguns is a notable inventor based in Somerville, MA (US). He has made significant contributions to the field of gas deposition systems, particularly through his innovative patent. With a focus on enhancing the efficiency and effectiveness of deposition processes, Deguns has established himself as a key figure in his industry.
Latest Patents
Eric W. Deguns holds a patent for "ALD systems and methods." This invention features a gas deposition system configured as a dual-chamber 'tower.' The design includes a frame that supports two reaction chamber assemblies, one positioned vertically above the other. Each chamber assembly is designed to accommodate a single generation 4.5 (GEN 4.5) glass plate substrate through a load port. The substrate is placed horizontally inside the hollow chamber, and the assembly incorporates removable and cleanable triangular-shaped input and output plenums. These plenums are strategically positioned outside the hollow chamber to create substantially horizontally directed laminar gas flow over the substrate's top surface. Additionally, each chamber is equipped with a cleanable and removable chamber liner assembly to contain precursor gases, thereby preventing contamination of the chamber's outer walls.
Career Highlights
Deguns is currently employed at Ultratech, Inc., where he continues to develop and refine innovative technologies in the field of gas deposition. His work has been instrumental in advancing the capabilities of deposition systems, making them more efficient and reliable for various applications.
Collaborations
Throughout his career, Eric has collaborated with several talented individuals, including Roger R. Coutu and Jill Svenja Becker. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Eric W. Deguns is a prominent inventor whose work in gas deposition systems has made a lasting impact on the industry. His innovative patent and contributions to Ultratech, Inc. highlight his dedication to advancing technology in this field.