This inventor holds 2 USPTO granted patents. Top assignee: Texas Instruments Corporation. Active years: 2003-2021.
Location History:
- Frisco, TX (US) (2003)
- Celina, TX (US) (2021)
Company Filing History:
Years Active: 2003-2021
Title: The Innovations of Eric Robert Trumbauer
Introduction
Eric Robert Trumbauer is an accomplished inventor based in Celina, TX (US). He has made significant contributions to the field of semiconductor devices and microelectromechanical systems (MEMS). With a total of 2 patents, Trumbauer's work showcases his expertise and innovative spirit.
Latest Patents
Trumbauer's latest patents include a "System and method for electronic die inking after automatic visual defect inspection." This method involves providing a semiconductor device and a computer-readable medium with instructions for performing the method. It includes receiving a first wafer defect map that defines comparison regions and identifies visual defect locations for a wafer. The method also determines the format of the comparison regions, which can include die-to-die, partial-shot-to-partial-shot, and full-shot-to-full-shot formats. Additionally, if the comparison format is not die-to-die, mapping information is received that provides die locations within the comparison regions.
Another notable patent is the "Post metal etch clean process using soft mask." This method is designed for patterning a metal layer that cleans residue from a metal etch process without removing a photoresist etch mask. It is particularly useful for the fabrication of micromirror devices or other MEMS devices that utilize photoresist spacer layers. The process involves spinning a photoresist layer onto the mirror metal layer, patterning and developing the photoresist, and inspecting the patterned photoresist before etching the mirror metal layer.
Career Highlights
Trumbauer is currently employed at Texas Instruments Corporation, where he continues to innovate and contribute to advancements in technology. His work has had a significant impact on the development of semiconductor devices and MEMS technologies.
Collaborations
Throughout his career, Trumbauer has collaborated with notable colleagues, including Michael Jay Jenson and Jon Evan Button. These collaborations have further enhanced his contributions to the field.
Conclusion
Eric Robert Trumbauer is a prominent inventor whose work in semiconductor devices and MEMS has led to valuable patents and advancements in technology. His innovative methods and dedication to his field continue to inspire future developments.