Eric R Vaughan

Title: Innovations of Eric R Vaughan

Introduction

Eric R Vaughan is a notable inventor based in Santa Cruz, California. He has made significant contributions to the field of semiconductor technology, particularly in wafer processing systems. With a total of two patents to his name, Vaughan's work has had a considerable impact on the industry.

Latest Patents

Vaughan's latest patents include a semiconductor wafer processing system featuring vertically-stacked process chambers and a single-axis dual-wafer transfer system. This innovative system comprises a multi-chamber module that includes dedicated loadlock chambers for each semiconductor wafer process chamber. Each process chamber is equipped with a chuck to hold a wafer during processing. The design allows for the multi-chamber modules to be arranged in a linear array. Additionally, the system incorporates a dual-wafer single-axis transfer arm, which is pivotally mounted within the loadlock chamber. This apparatus is capable of transporting two wafers simultaneously—one unprocessed and one processed—between the loadlock chamber and the process chamber.

Career Highlights

Throughout his career, Eric R Vaughan has worked with several prominent companies, including Aviza Technology Limited and ASML US, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

Vaughan has collaborated with notable colleagues such as Richard Savage and Frank S Menagh. These partnerships have likely enhanced his work and contributed to the advancements in the semiconductor field.

Conclusion

Eric R Vaughan's contributions to semiconductor wafer processing systems demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology in this critical area.