Ekkehard Pruefer

Title: Ekkehard Pruefer: Innovator in Semiconductor Technology

Introduction

Ekkehard Pruefer is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the performance and reliability of transistors, which are crucial components in modern electronic devices.

Latest Patents

Pruefer's latest patents include innovative methods aimed at improving transistor performance. One of his patents is for a drain/source extension structure of a field effect transistor with reduced boron diffusion. This invention modifies the dielectric liner for a spacer structure to enhance diffusion blocking characteristics, thereby significantly reducing the out-diffusion of P-dopants like boron. This advancement leads to improved performance, particularly for P-type transistors, while maintaining compatibility with conventional techniques.

Another significant patent is a method for reducing silicide defects by removing contaminants prior to drain/source activation. This process involves consuming a surface portion of polysilicon or silicon material after implantation and before the activation of dopants. By efficiently removing contaminants, the process uniformity during silicidation is enhanced, which reduces defect rates and improves the reliability of static RAM cells.

Career Highlights

Throughout his career, Pruefer has worked with prominent companies in the semiconductor industry, including Advanced Micro Devices Corporation and Globalfoundries Inc. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor technology.

Collaborations

Pruefer has collaborated with notable professionals in his field, including Klaus Hempel and Stephan Kruegel. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking technologies in the semiconductor sector.

Conclusion

Ekkehard Pruefer's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the performance and reliability of electronic devices, showcasing the importance of innovation in this field.