The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Feb. 13, 2007
Ekkehard Pruefer, Dresden, DE;
Ralf Van Bentum, Moritzburg, DE;
Klaus Hempel, Dresden, DE;
Stephan Kruegel, Reichenberg, DE;
Ekkehard Pruefer, Dresden, DE;
Ralf Van Bentum, Moritzburg, DE;
Klaus Hempel, Dresden, DE;
Stephan Kruegel, Reichenberg, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
By modifying the dielectric liner for a spacer structure so as to exhibit an enhanced diffusion blocking characteristic, for instance by incorporating nitrogen, the out-diffusion of P-dopants, such as boron, into the dielectric material may be significantly reduced. Consequently, transistor performance, especially of P-type transistors, may be significantly enhanced while nevertheless a high degree of compatibility with conventional techniques may be maintained.