Gilroy, CA, United States of America

Edward T Ferri, Jr


Average Co-Inventor Count = 2.3

ph-index = 10

Forward Citations = 247(Granted Patents)


Company Filing History:


Years Active: 1994-2003

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13 patents (USPTO):Explore Patents

Title: The Innovative Mind of Edward T. Ferri, Jr.

Introduction

Edward T. Ferri, Jr. is a prominent inventor based in Gilroy, California, renowned for his substantial contributions to the semiconductor industry. With a remarkable total of 13 patents to his name, Ferri's work focuses on advanced methods and systems for semiconductor wafer processing. His innovations not only enhance manufacturing efficiency but also promote environmental sustainability.

Latest Patents

Among Ferri's latest patents is a significant advancement in the semiconductor field: the "Method of transporting a semiconductor wafer in a wafer polishing system." This invention presents a system and method designed for planarizing multiple semiconductor wafers. It incorporates an innovative process path that utilizes at least two polishing stations to achieve partial planarization. The system is characterized by an enhanced process path, featuring a detachable wafer carrying head that rotates between various processing points. Additionally, Ferri's invention improves polishing accuracy through linear polishers equipped with pneumatically adjustable belt tensioning and alignment capabilities.

Another notable patent is the "Apparatus and process for separation and recovery of liquid and slurry abrasives used for polishing." This invention effectively separates abrasive components and clear fluids from aqueous slurries used in semiconductor planarization. The technology allows for the reuse of the clear liquid, which can be utilized in non-process applications or safely disposed of. A solids detection device plays a crucial role in identifying the concentration of abrasive solids, enabling the diversion of the effluent stream based on a predefined threshold. This innovation ultimately promotes sustainability by allowing water reuse in high purity applications.

Career Highlights

Edward T. Ferri, Jr. has had a fruitful career, with significant roles in prominent companies. He has made substantial contributions at Applied Chemical Solutions and Lam Research Corporation, which are recognized leaders in the semiconductor manufacturing sector. Through his work, Ferri has significantly advanced technologies aimed at improving wafer fabrication processes.

Collaborations

Throughout his career, Ferri has collaborated with esteemed professionals in the field. Notably, he has worked alongside J. Tobin Geatz and Randall L. Green, both of whom share a commitment to innovation in semiconductor technology. Their collaborative efforts have contributed to the development of efficient processes and systems that enhance semiconductor manufacturing.

Conclusion

Edward T. Ferri, Jr. stands as a testament to innovation in the semiconductor industry, with his 13 patents reflecting his dedication to advancing technology. His continued work not only fosters greater efficiency but also prioritizes environmental sustainability, making a lasting impact in his field. Ferri's contributions will likely influence the semiconductor manufacturing landscape for years to come.

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