Company Filing History:
Years Active: 1998-2003
Title: Innovations by Douglas Keith Sturtevant
Introduction
Douglas Keith Sturtevant is a notable inventor based in Essex Junction, VT (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of chemical mechanical polishing (CMP) processes. With a total of 4 patents, Sturtevant's work has advanced the efficiency and effectiveness of metal interconnects in semiconductor manufacturing.
Latest Patents
Sturtevant's latest patents include a method to prevent leaving residual metal in the CMP process of metal interconnects. This invention discloses a CMP slurry for polishing semiconductor wafers during the formation of metal interconnects. The first slurry, which contains ferric nitrate, effectively removes excess metal while leaving metal residues on the wafer surface. A second slurry, utilizing potassium iodate solution, is designed to remove these residues with minimal scratching of the underlying dielectric. This innovative approach results in more robust metal interconnects, lowering overall resistance, reducing shorts, and protecting the dielectric layer. Another significant patent involves a composite polish pad for CMP, which features circumferential rings of alternating compressibility made from hard and soft materials. This design enhances the polishing process, ensuring better results for semiconductor wafers.
Career Highlights
Sturtevant is currently employed at International Business Machines Corporation (IBM), where he continues to develop cutting-edge technologies in semiconductor manufacturing. His work has been instrumental in improving the reliability and performance of semiconductor devices.
Collaborations
Throughout his career, Sturtevant has collaborated with talented individuals such as Matthew T Tiersch and Jose L Cruz. These partnerships have contributed to the successful development of his innovative patents.
Conclusion
Douglas Keith Sturtevant's contributions to semiconductor technology through his patents and collaborations have significantly impacted the industry. His innovative methods and designs continue to enhance the efficiency of semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.