Company Filing History:
Years Active: 1998
Title: Douglas Earl Benoit: Innovator in Semiconductor Processing
Introduction
Douglas Earl Benoit is a notable inventor based in Milton, Vermont, who has made significant contributions to the field of semiconductor processing. His innovative approach to temperature control during the manufacturing process has led to advancements in the precision of semiconductor devices.
Latest Patents
Benoit holds a patent for a "Liquid immersion heating process for substrate temperature uniformity." This invention involves baking a temperature-sensitive film onto a semiconductor substrate by immersing it in a heated liquid. The process ensures temperature uniformity within ±0.2°C across varying thicknesses in silicon wafers and membranes. This precision is crucial for achieving improved line size control after exposure and development, down to 0.25 μm.
Career Highlights
Douglas Benoit is associated with the International Business Machines Corporation (IBM), where he has applied his expertise in semiconductor technology. His work has been instrumental in enhancing the manufacturing processes used in the production of semiconductor devices.
Collaborations
Benoit has collaborated with notable colleagues such as Harold G. Linde and Denise M. Puisto, contributing to a team that focuses on advancing semiconductor technologies.
Conclusion
Douglas Earl Benoit is a key figure in the semiconductor industry, with a patent that showcases his innovative approach to temperature control in manufacturing processes. His contributions continue to influence the field and improve the precision of semiconductor devices.