Dongkyeng Han

Title: Innovations of Dongkyeng Han

Introduction

Dongkyeng Han is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative spirit and technical expertise.

Latest Patents

One of his latest patents is a semiconductor fabrication apparatus. This apparatus comprises a light source configured to emit light, a substrate stage arranged to receive a substrate exposed to the emitted light, a reticle arranged between the substrate stage and the light source, and a reticle stage arranged to receive the reticle. The reticle stage includes a lower plate, an upper plate arranged above the lower plate, and an actuator connected to the lower plate configured to move in a direction parallel to the upper plate. Additionally, a first cable slab is arranged between the upper plate and the lower plate and connected to one side of the actuator, along with a first cable cover that surrounds the outer periphery of the first cable slab and contacts the lower plate when the first cable slab becomes bent.

Another notable patent is for an apparatus for generating extreme ultraviolet light and a lithography apparatus including the same. This extreme ultraviolet (EUV) light generating apparatus includes a vessel with a first end and a second end, providing an internal space extending from the first end to the second end. It features a concave mirror adjacent to the first end of the vessel, a droplet generator supplying a droplet to the internal space, and a laser light source that irradiates a laser beam to cause the droplet to emit EUV light. Furthermore, a gas jet receives a flow control gas and sprays it into the internal space of the vessel, with nozzles that spray the received flow control gas in a downward direction.

Career Highlights

Dongkyeng Han is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor fabrication and EUV light generation.

Collaborations

He has collaborated with notable coworkers such as Ohkug Kwon and Junghwan Kim, contributing to various projects that enhance the technological landscape.

Conclusion

Dongkyeng Han's innovative contributions to semiconductor technology and his impressive patent portfolio highlight his role as a leading inventor in the field. His work at Samsung Electronics Co., Ltd.