The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Aug. 23, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Injae Lee, Hwaseong-si, KR;
Ohkug Kwon, Yongin-si, KR;
Sunghyup Kim, Hwaseong-si, KR;
Yongchan Kim, Hwaseong-si, KR;
Ouiserg Kim, Seongnam-si, KR;
Jeonggil Kim, Hwaseong-si, KR;
Junghwan Kim, Bucheon-si, KR;
Hosun Yoo, Seongnam-si, KR;
Daerim Choi, Hwaseong-si, KR;
Dongkyeng Han, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
An extreme ultraviolet (EUV) light generating apparatus includes a vessel including a first end and a second end opposite to each other and providing an internal space extending from the first end to the second end, a concave mirror adjacent to the first end of the vessel, a droplet generator supplying a droplet to the internal space of the vessel, a laser light source irradiating a laser beam to cause the droplet to emit EUV light, and a gas jet receiving a flow control gas and spraying the received flow control gas into the internal space of the vessel. The gas jet includes a ring-shaped main body including nozzles spaced apart from one another in a circumferential direction. The nozzles spray the received flow control gas in a downward direction.