Company Filing History:
Years Active: 2022-2025
Title: The Innovative Contributions of Donghyeon Na
Introduction
Donghyeon Na is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of plasma technology, holding a total of six patents. His work focuses on methods and apparatuses for measuring plasma parameters, which are crucial in various semiconductor manufacturing processes.
Latest Patents
Donghyeon Na's latest patents include a "Method of measuring parameters of plasma," an "Apparatus for measuring parameters of plasma," a "Plasma processing system," and a "Method of processing wafer." The apparatus for measuring plasma parameters features a cutoff probe that includes a first antenna designed to emit microwaves to the plasma, and a second antenna that generates an electrical signal in response to the microwaves received. This innovative design enhances the accuracy of plasma measurements, which is vital for semiconductor applications. Additionally, his plasma etching method involves providing a source power with a single pulse to generate plasma on a substrate, followed by bias powers to concentrate and accelerate the plasma, showcasing his expertise in semiconductor device fabrication.
Career Highlights
Donghyeon Na is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of plasma technology. His work has not only advanced the understanding of plasma parameters but has also contributed to the efficiency of semiconductor manufacturing processes.
Collaborations
Some of his notable coworkers include Seungbo Shim and Minyoung Hur, who have collaborated with him on various projects related to plasma technology.
Conclusion
Donghyeon Na's innovative work in plasma technology and his contributions to semiconductor manufacturing highlight his importance as an inventor in the field. His patents reflect a deep understanding of the complexities involved in plasma measurement and processing, making him a valuable asset to Samsung Electronics and the broader technological community.
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