Dmitri G Starodub is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of optical inspection systems, particularly in the detection of defects in multilayer structures. With a total of 2 patents, his work has advanced the methodologies used in this critical area of technology.

Latest Patents

One of Dmitri's latest patents is focused on a phase filter for enhanced defect detection in multilayer structures. This patent discloses methods and apparatus for facilitating defect detection in a multilayer stack. The method includes the selection of a set of structure parameters for modeling a particular multilayer stack and a specific defect contained within it. Additionally, a set of operating parameters for an optical inspection system is established. An electromagnetic simulation is performed based on these parameters, analyzing waves scattered from the multilayer stack and defect as they arrive at the collection pupil of the optical inspection system. The design of a phase filter is then determined to compensate for adverse effects on obtaining a defect signal and to enhance the defect signal. This innovative design is provided for fabrication or configuration within the optical inspection system, allowing for effective detection of defects in multilayer stacks.

Career Highlights

Dmitri G Starodub is currently employed at KLA-Tencor Corporation, a leading company in the field of process control and yield management solutions. His work at KLA-Tencor has allowed him to apply his expertise in optical inspection systems and contribute to advancements in the industry.

Collaborations

Dmitri collaborates with Robert M Danen, a fellow professional in the field. Their partnership enhances the innovative efforts within their projects and contributes to the overall success of their endeavors.

Conclusion

Dmitri G Starodub's contributions to the field of optical inspection systems are noteworthy. His innovative patents and career at KLA-Tencor Corporation highlight his commitment to advancing technology in defect detection. His work continues to influence the industry positively.