Company Filing History:

7 out of 2,072

Georgia Tech Research Corporation

Years Active: 1999-2008

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7431796 - Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment (2008-10-07),

2. 6852195 - Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment (2005-02-08),

3. 6258287 - Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment (2001-07-10),

4. 6045980 - Optical digital media recording and reproduction system (2000-04-04),

5. 6033587 - Method and apparatus for low energy electron enhanced etching and (2000-03-07),

6. 6027663 - Method and apparatus for low energy electron enhanced etching of (2000-02-22),

7. 5917285 - Apparatus and method for reducing operating voltage in gas discharge (1999-06-29),

8. 5882538 - Method and apparatus for low energy electron enhanced etching of (1999-03-16),

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For the Inventor, By the Inventor

Dmitri A Choutov

Location History:

Company Filing History:

Years Active: 1999-2008