This inventor holds 3 USPTO granted patents and 1 EPO patent. Top assignee: Lam Research Ag. Active years: 2013-2019.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2013-2019
Title: Dietmar Hammer: Innovator in Liquid Treatment Technologies
Introduction
Dietmar Hammer is a notable inventor based in Treffen, Austria. He has made significant contributions to the field of liquid treatment technologies, holding a total of 3 patents. His innovative work focuses on devices and methods that enhance the efficiency of liquid removal from disc-like articles.
Latest Patents
One of Dietmar Hammer's latest patents is a device and method for removing liquid from a surface of a disc-like article. This device features a spin chuck that holds and rotates a single disc-like article while a liquid dispenser dispenses liquid onto it. Additionally, it includes a first gas dispenser with nozzles that blow gas onto the disc, and a second gas dispenser that also blows gas onto the disc. The design incorporates a rotary arm that moves both dispensers across the disc, optimizing the liquid removal process.
Another significant patent is an apparatus for liquid treatment of wafer-shaped articles. This apparatus includes a spin chuck designed to hold a wafer-shaped article at a specific distance from its upper surface. A treatment assembly is mounted above the spin chuck, extending radially to effectively treat the wafer-shaped article without interference from gripping pins that hold the article in place.
Career Highlights
Dietmar Hammer is currently associated with Lam Research AG, a company known for its advanced semiconductor manufacturing equipment. His work at Lam Research AG has allowed him to develop and refine technologies that are crucial for the semiconductor industry.
Collaborations
Throughout his career, Dietmar has collaborated with talented individuals such as Michael Brugger and Christoph Semmelrock. These collaborations have contributed to the advancement of innovative solutions in liquid treatment technologies.
Conclusion
Dietmar Hammer's contributions to liquid treatment technologies through his patents and work at Lam Research AG highlight his role as a key innovator in the field. His inventions continue to influence the efficiency of processes in the semiconductor industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile