This inventor holds 5 USPTO granted patents and 3 published patent applications and 1 EPO patent. Top assignee: Kla Corporation. Active years: 2021-2024.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2021-2024
Title: Diana Shaphirov: Innovator in Optical Metrology
Introduction
Diana Shaphirov is a prominent inventor based in Yoqneam Illit, Israel. She has made significant contributions to the field of optical metrology, holding a total of 5 patents. Her work focuses on advancing measurement techniques that utilize short-wave infrared wavelengths.
Latest Patents
One of her latest patents is titled "Optical metrology utilizing short-wave infrared wavelengths." This invention describes an optical metrology tool that includes illumination sources generating light in both the short-wave infrared (SWIR) spectral range and outside of it. The tool features illumination optics that direct this light to a sample, along with two imaging channels equipped with detectors for capturing images based on different wavelength ranges. The controller processes these images to generate optical metrology measurements of the sample.
Another notable patent is "Imaging overlay targets using moiré elements and rotational symmetry arrangements." This patent outlines a metrology target that consists of rotationally symmetric working zones featuring specific patterns. These patterns are designed to indicate overlay errors between sample layers, enhancing the precision of measurements in optical applications.
Career Highlights
Diana Shaphirov is currently employed at Kla Corporation, where she continues to innovate in the field of optical metrology. Her expertise and dedication have positioned her as a key figure in her industry, contributing to advancements that benefit various technological applications.
Collaborations
Diana collaborates with talented individuals such as Mark Ghinovker and Vladimir Levinski. Their combined efforts foster a creative environment that drives innovation and enhances the development of cutting-edge technologies.
Conclusion
Diana Shaphirov's work in optical metrology exemplifies her commitment to innovation and excellence. Her patents reflect her expertise and the impact of her contributions to the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile