Detlef Wolter

Title: Detlef Wolter: Innovator in Reticle Handling and Breathing Apparatus Technologies

Introduction

Detlef Wolter is a notable inventor based in Jena, Germany. He has made significant contributions to the fields of reticle handling in EUV reticle inspection tools and advanced breathing apparatus technologies. With a total of 2 patents, his work showcases innovative solutions that enhance operational efficiency and user experience.

Latest Patents

One of Wolter's latest patents is titled "Apparatus and methods for reticle handling in an EUV reticle inspection tool." This invention presents systems and methods to control particle generation in a reticle inspection system. The technology reduces the number of particles added to a reticle during the load-inspect-unload sequence by performing all reticle contact events in a controlled, flowing air environment. In this design, the reticle is fixed to a carrier by clamping outside of the vacuum environment, allowing the carrier to be coupled to the reticle stage of the inspection system. This approach avoids the high levels of back-side particulation associated with electrostatic chucking. Additionally, the carrier can be coupled to the reticle stage in any of four different orientations separated by ninety degrees.

Another significant patent by Wolter is for a "Breathing apparatus with a display unit." This invention features a display unit that transmits measured data into the field of vision of a person wearing the unit. The design improves the readability of the displayed data in daylight while simultaneously reducing energy demand. The display field includes an LC display that is at least transparent for transmission radiation. An optical concentrator collects ambient light and emits it through a light exiting surface, enhancing visibility.

Career Highlights

Throughout his career, Detlef Wolter has worked with prominent companies such as Drägerwerk Aktiengesellschaft and KLA-Tencor Corporation. His experience in these organizations has contributed to his expertise in developing innovative technologies.

Collaborations

Wolter has collaborated with notable professionals in his field, including Uwe Schaller and Hansjochen Schuck. These partnerships have likely fostered a creative environment that encourages the development of groundbreaking inventions.

Conclusion

Detlef Wolter's contributions to reticle handling and breathing apparatus technologies highlight his innovative spirit and dedication to improving existing systems. His patents reflect a commitment to enhancing efficiency and user experience in critical applications.