Deqiang Zeng

Title: The Innovative Contributions of Deqiang Zeng

Introduction

Deqiang Zeng is a notable inventor based in Shanghai, China. He has made significant contributions to the field of workpiece processing technology. With a total of 2 patents, Zeng's innovations reflect his expertise and dedication to advancing industrial processes.

Latest Patents

One of Zeng's latest patents is a workpiece processing apparatus that integrates plasma and thermal processing systems. This apparatus features a processing chamber and a plasma chamber, which is separated from the processing chamber. The plasma chamber is equipped with a plasma source that generates plasma, while one or more radiative heat sources are designed to heat the workpiece. A dielectric window is strategically placed between the workpiece support and the heat sources. Additionally, the apparatus includes a rotation system that utilizes a magnetic actuator to rotate the workpiece, enhancing the efficiency of the processing.

Career Highlights

Throughout his career, Deqiang Zeng has worked with prominent companies in the semiconductor industry. He has been associated with Beijing E-town Semiconductor Technology Co., Ltd and Mattson Technology, Inc. His experience in these organizations has contributed to his development as an inventor and innovator.

Collaborations

Zeng has collaborated with various professionals in his field, including Dieter Hezler and Keli Huang. These collaborations have likely enriched his work and led to further advancements in his inventions.

Conclusion

Deqiang Zeng's contributions to workpiece processing technology demonstrate his innovative spirit and commitment to improving industrial processes. His patents reflect a blend of creativity and technical expertise that continues to influence the industry.