Dennis Minkoley

Title: Dennis Minkoley: Innovator in Metallization Technology

Introduction

Dennis Minkoley is a notable inventor based in Chur, Switzerland. He has made significant contributions to the field of metallization technology, holding 2 patents that showcase his innovative approaches.

Latest Patents

Minkoley's latest patents include an "Apparatus for sputtering and a method of fabricating a metallization structure." This method involves depositing a TaN layer by applying a power supply between an anode and a target in a series of pulses. This process reactively sputters Ta from the target onto the substrate, forming a TaN seed layer. Following this, a Ta layer is deposited onto the TaN seed layer using a similar pulsing technique, enhanced by a high-frequency signal applied to a pedestal supporting the substrate. This generates a self-bias field adjacent to the substrate, optimizing the metallization process.

Career Highlights

Throughout his career, Minkoley has worked with prominent companies in the technology sector. He has been associated with Evatec Advanced Technologies AG and Oerlikon Advanced Technologies AG, where he has contributed to advancements in sputtering technology and metallization processes.

Collaborations

Minkoley has collaborated with notable professionals in his field, including Juergen Weichart and Mohamed Elghazzali. Their combined expertise has furthered the development of innovative solutions in metallization technology.

Conclusion

Dennis Minkoley's contributions to the field of metallization technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively.