Dean Shough

Title: Dean Shough: Innovator in Thermal Management Systems

Introduction

Dean Shough is a notable inventor based in Newark, CA, who has made significant contributions to the field of thermal management systems. With a focus on advanced technologies for EUV lithography, his work has implications for various applications in the semiconductor industry.

Latest Patents

Dean Shough holds a patent for "Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography." This patent describes systems, assemblies, and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source. Dean Shough has 1 patent to his name.

Career Highlights

Throughout his career, Dean has been associated with Media Lario S.r.l., where he has contributed to innovative projects and advancements in thermal management technologies. His expertise in this area has positioned him as a valuable asset to his company and the industry at large.

Collaborations

Dean has worked alongside talented colleagues such as Giovanni Bianucci and Fabio E Zocchi, contributing to a collaborative environment that fosters innovation and creativity.

Conclusion

Dean Shough's work in thermal management systems showcases his dedication to advancing technology in the field of EUV lithography. His contributions are vital for the ongoing development of efficient thermal management solutions in the semiconductor industry.