Location History:
- Manassas, VA (US) (1985 - 1990)
- Ithaca, NY (US) (1991 - 1993)
- Wappingers Falls, NY (US) (1992 - 1994)
- Montgomery, NY (US) (1995 - 2001)
Company Filing History:
Years Active: 1985-2001
Title: Innovations by David Stanasolovich
Introduction
David Stanasolovich is a notable inventor based in Montgomery, NY (US). He has made significant contributions to the field of technology, particularly in the area of etching processes and wafer cleaning techniques. With a total of 18 patents to his name, Stanasolovich continues to push the boundaries of innovation.
Latest Patents
One of his latest patents is titled "Precise endpoint detection for etching processes." This invention involves the formation of a homogeneous marker at the surface of a deposited material during plasma enhanced chemical vapor deposition. The marker, which can be created by the adsorption of trace amounts of ambient materials, allows for improved accuracy in determining the endpoint of the etching process. The markers do not significantly affect the electrical, chemical, or optical properties of the deposited material, ensuring its homogeneity remains intact.
Another significant patent is the "Apparatus for uniform cleaning of wafers using megasonic energy." This invention describes a method for cleaning and etching surfaces using sonic energy in the megahertz range. The apparatus includes a recirculation tank that minimizes reflection of megasonic energy, enhancing the cleaning efficiency. The innovative design incorporates an anti-reflection mechanism, which can consist of gas bubbles or anechoic structures, to optimize the cleaning process.
Career Highlights
David Stanasolovich is currently employed at International Business Machines Corporation (IBM), where he continues to develop groundbreaking technologies. His work has had a profound impact on the semiconductor industry, particularly in improving manufacturing processes.
Collaborations
Throughout his career, Stanasolovich has collaborated with talented individuals such as Ronald A Warren and Donna Rizzone Cote. These partnerships have contributed to the advancement of his innovative projects and patents.
Conclusion
David Stanasolovich is a distinguished inventor whose work in etching processes and wafer cleaning has led to numerous patents. His contributions to technology continue to influence the industry, showcasing the importance of innovation in advancing manufacturing techniques.