Company Filing History:
Years Active: 2001-2005
Title: **Innovator Spotlight: David M. Johns**
Introduction
David M. Johns is an accomplished inventor based in Lakeside, California, who has made significant contributions to the field of laser technology. With a total of three patents to his name, Johns has focused his efforts on developing advanced laser systems for innovative applications, particularly in integrated circuit lithography.
Latest Patents
One of his notable inventions is the "Four KHz gas discharge laser system." This cutting-edge excimer laser is capable of generating a high-quality pulsed laser beam at impressive pulse rates of about 4,000 Hz, with pulse energies exceeding 5 mJ. A key feature of this technology is its design as an ArF (Argon Fluoride) excimer laser, tailored specifically to serve as a light source in integrated circuit lithography. The patented system includes an improved wavemeter equipped with specialized software that monitors output beam parameters. Additionally, it controls a fast PZT-driven tuning mirror and manages the pulse power charging voltage to maintain precise wavelength and pulse energy within desired limits. The design also incorporates a unique fan system, where two fan motors drive a single tangential fan to ensure optimal gas flow, effectively clearing discharge debris during the brief intervals between laser pulses.
Career Highlights
David M. Johns works at Cymer, Inc., a company recognized for its advanced technology in light sources for semiconductor manufacturing. His experience and expertise in laser systems have been instrumental in the development of groundbreaking technologies that serve critical functions in the microelectronics industry.
Collaborations
Throughout his career, Johns has collaborated with esteemed colleagues, including William N. Partlo and Richard L. Sandstrom. Together, they have contributed to several projects that have advanced laser technology and its applications within various fields.
Conclusion
David M. Johns continues to be a pivotal figure in the realm of laser innovations. His patents, particularly in excimer laser systems, demonstrate his commitment to advancing technology that enhances the capabilities and efficiency of integrated circuit manufacturing. As laser technology evolves, the contributions of inventors like Johns will undoubtedly pave the way for future advancements in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.