Location History:
- Dresden, DE (2009 - 2011)
- Schenectady, NY (US) (2015 - 2019)
Company Filing History:
Years Active: 2009-2019
Title: David Hetzer: Innovator in High-Precision Dispense Systems
Introduction
David Hetzer is a prominent inventor based in Schenectady, NY (US). He holds a total of 6 patents that showcase his expertise in advanced dispense systems and lithographic processes. His innovative contributions have significantly impacted the field of microfabrication.
Latest Patents
One of Hetzer's latest patents is the "High-precision dispense system with meniscus control." This invention features a bladder-based dispense system that utilizes an elongate bladder to selectively expand and contract, aiding in dispense actions. The system effectively compensates for filter-lag, which is a common issue in fluid filtering for microfabrication. Additionally, it ensures high purity and precision in dispensing. A meniscus sensor is integrated to monitor the position of the meniscus of process fluid at the nozzle, allowing for precise control. The elongate bladder unit maintains the meniscus position by adjusting its expansion or contraction, facilitating a suck-back action after dispensing.
Another significant patent is the "EUV resist sensitivity reduction." This method involves patterning a substrate by forming a layer of radiation-sensitive material and preparing a pattern using a lithographic process. The process includes a critical dimension (CD) slimming step to reduce the CD and a vapor smoothing step to minimize roughness, enhancing the quality of the final pattern.
Career Highlights
David Hetzer is currently employed at Tokyo Electron Limited, where he continues to develop innovative technologies in the field of microfabrication. His work has been instrumental in advancing high-precision dispense systems, which are crucial for various applications in the semiconductor industry.
Collaborations
Hetzer collaborates with notable colleagues, including Joerg Bischoff and Lior Huli, who contribute to the innovative projects at Tokyo Electron Limited.
Conclusion
David Hetzer's contributions to the field of microfabrication through his patents and innovative technologies highlight his role as a leading inventor. His work continues to influence advancements in high-precision dispense systems and lithographic processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.