This inventor holds 1 USPTO granted patent. Top assignee: Motorola Corporation. Active years: 2002.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2002
Title: David Haggart: Innovator in Semiconductor Polishing Technology
Introduction
David Haggart is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the area of polishing processes.
Latest Patents
Haggart holds a patent for a "Polishing head for wafer, and method for polishing." This innovative polishing head is designed for a chemical-mechanical polishing machine that securely holds a semiconductor wafer against a polishing pad. The device features a chuck with a pressure chamber that applies a down force uniformly to the wafer's backside. Additionally, an electrode arrangement within the chamber is coplanar to the wafer, allowing for compensation of any irregularities in the wafer or chuck by applying a force distribution that corresponds to these irregularities.
Career Highlights
David Haggart is associated with Motorola Corporation, where he has been instrumental in advancing semiconductor polishing technologies. His work has contributed to improving the efficiency and effectiveness of wafer polishing processes.
Collaborations
Haggart has collaborated with notable colleagues, including Walter Glashauser and Lutz Teichgräber, who have also contributed to advancements in semiconductor technologies.
Conclusion
David Haggart's innovative work in semiconductor polishing technology exemplifies the importance of precision in the manufacturing process. His contributions continue to influence the industry and enhance the performance of semiconductor devices.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
